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MIME 570 Micro- and Nano-Fabrication Fundamentals (3 credits)

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Offered by: Mining & Materials Engineering (Faculty of Engineering)

Overview

Mining & Materials Engineering : Fundamentals of micro- and nano-fabrication technologies. Lithographic, etching, deposition, and implantation and various control parameters of these processes and their resulting effects on structure, materials quality, and conformality.

Terms: Fall 2013

Instructors: Quitoriano, Nathaniel (Fall)

  • (3-0-6)

  • Prerequisite: MIME 467 or ECSE 330 or equivalent, or permission of instructor

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