Coating system 鈥� Leica EM ACE200
| EQUIPMENT FEATURES | SPECIFICATIONS |
|---|---|
|
Model |
Leica EM ACE200 |
|
Controls |
Fully automated or fully manual modes |
|
Features and Applications |
Carbon source Sputter source : Au/Pd Planetary drive stage Sample stage with 18 positions for 1/2鈥� SEM stubs (optional) Quartz crystal thickness measurement |
|
Location |
MS2-094c |